|

Contaminants on MEMS device
only visible at 248 nm
UV Microscope Applications
NIR Microscope Applications
UVM-1 UV
Microscope
UVM-1
NIR Microscope

General
diagram of a
transmission UV-visible-NIR microscope

Silicon wafer with visible
imaging

Silicon wafer with NIR
imaging |
 |

The UV microscope and NIR
microscope are designed to
image in regions beyond the
visible range. While
the usable spectral range of
each unit covers the UV,
visible and near infrared
regions, their optics and
light sources may be
optimized so that they are
more effective in either the
UV or NIR regions.
UV-visible-NIR Microscope
Design
The
standard model microscope,
as commonly available,
allows the user to image in
the visible range only.
For most modern microscopes
that ranges from 420 to 700
nm.
A UV-visible-NIR range
microscope covers a much
larger spectral range and
can image many things that
are not visible to the eye.
As with a standard
microscope, the
UV-visible-NIR microscope
consists of light sources
for transmission or incident
(reflectance or
fluorescence) illumination,
optics to focus the UV,
visible and NIR energy on
the sample, more optics to
collect and focus that
energy on the imaging system
and finally the imaging
system that is sensitive in
the UV or NIR regions.
The light sources are
selected so that they have
strong outputs in the
ultraviolet and near
infrared regions. The
optics of such microscopes
are made of materials that
are transparent and can
focus UV, visible and NIR
range energy. And
finally, the imaging systems
are sensitive to either UV
or NIR light in order to
digitally store high
resolution UV or NIR images.
Of course, such
microscopes can be optimized
for either the UV or NIR
regions. Optimization
entails changes in the light
sources, optics and most
importantly the imaging
systems. The imaging
systems selection is quite
important as a silicon based
system will not work in the
near infrared region as the silicon is
transparent there!
In fact, one of the most
important uses for the NIR
microscope is to image
circuits and devices
embedded within bonded
silicon devices. Such
devices consist of two
silicon wafers that have
been joined together and
contain circuitry between
them. As can be
seen, imaging silicon with a
standard microscope yields
information only of the surface
structure. However, in
the NIR region, silicon is
transparent and a NIR
microscope can be used to
image circuitry contained
within the device.
UV microscope have many
uses as well. They are
commonly used for microscopy
of contaminants that are
transparent in the visible
region but absorb light in
the ultraviolet. This is
especially important to precision industries such as
those manufacturing OLED
displays or semiconductor
chips. Another vital
application is imaging
protein crystals. In
drug discovery, protein
crystals are grown to
quickly develop new drugs.
However, salt crystals also
form in the same solution
and cannot be differentiated
by regular light microscopes.
By using a UV microscope,
the valuable protein
crystals can easily be
differentiated from the
waste salt
crystals.
|